DOPING A SILICON SINGLE CRYSTAL WITH TERBIUM THROUGH DIFFUSION.



Chop etilgan sana:

PDF
Saidimov Ya.A.
Research Institute of Semiconductor Physics and Microelectronics at the National University of Uzbekistan (Tashkent), Uzbekistan
Rumi R.F.
Research Institute of Semiconductor Physics and Microelectronics at the National University of Uzbekistan (Tashkent), Uzbekistan
Umarov F.B.
Research Institute of Semiconductor Physics and Microelectronics at the National University of Uzbekistan (Tashkent), Uzbekistan

Abstract

Using the diffusion method, monocrystalline samples of silicon doped with Thulium were prepared at 1250 degrees Celsius for 50 hours. The samples were found to have p-type conductivity after high-temperature annealing. After this process, the samples changed their type of conductivity from p-type to n-type.

Foydalangan adabiyotlar

1. Antonenko R.S., Karpov Yu.A., Shakhovtsov V.I., Shindich V.L., Spinar L.I., Yaskovets I.I. Electrophysical properties of irradiated p-Si with gadolinium admixture. – FTP, 1978, vol. 12, v. 9, pp. 1707-1713.
2. Shindich V.L. Investigation of the processes of radiation defect formation in silicon doped with rare earth elements. – Author's thesis. cand. dis. Kiev, 1982. 20 p .
3. Yu. A. Karpov, V. V. Mazurenko, V. V. Petrov, V. S. Prosolovich, V. D. Tkachev, On the interaction of atoms of rare earth elements with oxygen in silicon, Physics and Technology of semiconductors, 1984, volume 18, issue 2, 368-369
4. Latukhina N.V., Lebedev V.M. Diffusion alloying of silicon with rare earth elements. Materials of electronic technology. No. 1. Materials science and technology. Semiconductors. 2011. 7-12 p.
5. Alexandrov O.V., Yemtsev V.V., Poloskin D.S., Sobolev N.A., Shek E.I. Small acceptor centers formed during diffusion of erbium into silicon. FTP. -1994. - Vol.28, issue 11. -pp. 2045-2048.
6. Zainabiddinov S., Nazirov D.E., Akbarov A.Zh., Iminov A.A., Toshtemirov T.M. Diffusion of erbium into silicon. Letters to ZhTF. -1998. -Vol.24. No.2. -pp. 68-71.
7. D. E. Nazirov, G. S. Kulikov, R. S. Malkovich, Diffusion of erbium and thulium in silicon, Physics and Technology of Semiconductors, 1991, volume 25, issue 9, 1653-1654
8. Diffusion of terbium in silicon. Nazirov D.E. //FTP. 2006. Vol.40. V.6. pp. 650-651.
9. Fistul V.I. Introduction to semiconductor physics. Studies. A manual for universities. -2nd ed. – M.: Higher School, 1984. pp. 34-45.